WCS 500

Equipment

Web Coating System WCS 500 for roll-to-roll ALD

For the very first time in ALD history, roll–to–roll has been made viable and accessible for research and industrial production. The WCS 500 offers true roll–to–roll ALD on flexible webs up to 500 mm in width.

The Beneq WCS 500 has been designed as a development platform, which means it can address the different R&D needs of different customers. As an example, the WCS 500 can handle many types of substrate materials and thicknesses. With a coating capacity of 400,000 m²/year, the WCS 500 expands easily from R&D to pilot production for many industrial applications, including moisture barriers for flexible organic electronics and buffer layers for CIGS solar cells.

Performance highlights

true roll-to-roll ALD process
maximum web width 500 mm
non-contacting web handling
capacity 400,000 m²/year (for specific application)

System main components

Vacuum chamber with web reels, processing drum and ALD coating head
Beneq Precursor Delivery System (PDS)
Electrical and control cabinet
Precursor de-activation system
Vacuum pump

Technical specifications

Process temperature range	up to 150 ºC
Substrate size (web width)	up to 500 mm
Substrate material	polymer film or other flexible
Web speed	up to 2m/min
Throughput (for 25 nm film thickness)	400,000 m² /year
Control system	PLC control with PC user interface
Main dimensions, ALD system (L × W × H)	2060 × 2340 ×2150 (mm)
Main dimensions, Precursor Delivery System (L × W × H)	1750 × 800 × 1530 (mm)
Main dimensions, electrical cabinet (L × W × H)	1010 × 320 × 1220 (mm)