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Home » Equipment » Atomic Layer Deposition » TFS NX300

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See Beneq News
Beneq works with China Sunergy to improve c-Si solar cells

Beneq chosen by China Sunergy for higher solar cell efficiency

China Sunergy, a leading Chinese solar cell manufacturer, has selected Beneq ALD technology for surface passivation to improve the energy efficiency of its products. The first production-scale equipment will be delivered to China Sunergy in June 2013.

Says China Sunergy CTO, Dr Jianhua Zhao: "The reason to select batch ALD is because it provides the best passivation quality, enabling us to produce solar cells with the highest efficiency. Beneq is the most experienced company in large-scale batch ALD production. This makes them a natural partner for us. Additionally, Beneq’s ALD technology provides us with a cost-competitive solution,”.

Read the full article (PDF)

Link to China Sunergy homepage

TFS NX300

Thin Film System TFS NX300 for industrial surface passivation of c-Si solar cells

The Beneq TFS NX300 is an application-specific system designed for fully-automated industrial production of surface passivation on crystalline silicon (c-Si) solar cell wafers. The batch size enables an hourly throughput of 2000 wafers (double-side coating).
 

Coating specifications

 Batch size  250 wafers
 Wafer size  156 × 156 (mm)
 Film thickness  10 nm
 Throughput  2000 wafers/hour

 

More information

Being an application-specific system, more information related to the TFS NX300 can be found under the application page for Surface passivation for c-Si solar cells.

 

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TFS NX300

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Beneq © 2010, All rights reserved.
  • ALD equipment in general
  • TFS 200
  • TFS 200R
  • TFS 500
  • TFS 600
  • TFS 1200
  • TFS NX300
  • P400A and P800
  • WCS 500