TFS NX300
Thin Film System TFS NX300 for industrial surface passivation of c-Si solar cells
The Beneq TFS NX300 is an application-specific system designed for fully-automated industrial production of surface passivation on crystalline silicon (c-Si) solar cell wafers. The batch size is 500 pcs, enabling an hourly throughput of 3200 wafers.
Coating specifications
| Batch size | 500 wafers |
| Wafer size | 156 × 156 (mm) |
| Film thickness | 20 nm |
| Growth rate | 0.12 nm/cycle |
| Cycle time | 4 s |
| Coating chambers | 4 |
| Throughput | 3200 wafers/h |
More information
Being an application-specific system, more information related to the TFS NX300 can be found under the application page for Surface passivation for c-Si solar cells.
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