TFS 1200 and TFS 1200B

Thin Film System TFS 1200 for in-line and batch production of buffer layer on CIGS cells

The Beneq TFS 1200 is an application-specific system designed for industrial in-line production of buffer layer coatings on copper-indium-gallium-diselenide (CIGS) thin film solar cells. The maximum substrate size is 1200 × 1200 (mm), a recognized world-record in substrate size in ALD.
 

Coating specifications

Materials	Zn(O,S)  (Zn,Mg)O      (optional)  In2S3           (optional)
Thickness	10 - 50 nm
Process temperature	120 - 180 °C
Throughput and productivity  (for Beneq TFS 1200 in-line coating system)	panel amount:     5 panels/h (for 50 nm Zn(O,S)  coating)  max. panel size:  1200 × 1200 (mm)  annual capacity:  > 50,000 m²/a (≈ 6.5 MWp/a)
Throughput and productivity   Beneq TFS 1200 B off-line batch module   (6 substrates each)	panel amount:     45 panels/h (for 50 nm Zn(O,S)   coating)  max. panel size:  1200 x 1600 (mm)  annual capacity:  >670,000 m²/a (≈ 88 MWp/a)

 

More information

Being an application-specific system, more information related to the TFS 1200 can be found under the application page for Cadmium-free buffer layer for CIGS solar cells.