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TCO Coatings
TCO Coatings on Glass
The Beneq nAERO® based atmospheric Aerosol coating systems provide an efficient, high throughput,
production method for robust, high quality TCO coatings on glass for thin film solar cell industry.
The nAERO® coating systems are available either as stand-alone units or as units for integration to a
float glass production line. Properties of the durable SnO2:F TCO hard coatings can be tailored to optimize
performance and efficiency of each thin film solar cell technology and process flow. Beneq provides also
the development services for the optimization.
• Sheet resistance from < 10 Ω/square ... 15 Ω/square
• Transmission (visible) 75% ... 83%
• Haze, either < 1% or from 10% ... 20%
• Coating thickness 400 nm ... 700 nm
• Process temperature up to 700C, 550C ... 600C typical
• Temperable
• High throughput FCS 2000 stand alone production nAERO® systems, line speeds up to 7 m/min (up to 1.4m line width, wider glass upon request)
Learn more about nAERO®
Conformal Low Temperature TCO Coatings for CIGS and Nanostructured Solar Cells
• Highly uniform film on shaped substrates like on inner or outer walls of tubes, on nanotubes, on spheres, 3-dimensional surfaces, etc.
• Coating on sensitive surfaces: Low processing temperature and no ion bombardment
• High throughput through large batch processing
• Suitable to combine with other ALD films e.g. ion or moisture barriers (nCLEAR®)
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