Surface Passivation for c-Si

Applications

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Surface Passivation for c-Si

Beneq ALD industrial surface passivation of c-Si solar cells

A proven means to improve the efficiency of crystalline silicon (c-Si) solar cell wafers is surface passivation by atomic layer deposition (ALD). Passivation of the surface enhances the overall cell efficiency by prolonging the charge-carrier effective lifetime. Surface passivation by ALD is beneficial on both the front and rear surface of an n-type wafer.

Beneq batch ALD equipment P800 and TFS NX300, which have been developed with and for the PV industry, are designed for industrial surface passivation (Al₂O₃) treatment of c-Si solar cell wafers. With Beneq equipment, surface passivation can be applied to both n- and p-type cells.

Benefits of using Beneq ALD system

1 + percentage point increase in efficiency
Completely conformal and pinhole-free passivation layer
No plasma damage
Low-temperature processing (150 - 250 °C)
No atmospheric contamination

Throughput

1600 wafers/hour, single-side coating on a Beneq P800
2000 wafers/hour, double-side coating on a Beneq TFS NX300

Cost of ownership

0.021 €/wafer, single-side coating on a Beneq P800
0.034 €/wafer, double-side coating on a Beneq TFS NX300

For customers to gain instant access to the benefits of ALD and Al₂O₃ surface passivation, prior to industrial production, Beneq offers extensive coating services.

Beneq TFS NX300 for double-side coating

For double-side coating, we offer the TFS NX300 Thin Film System. It is an independent coating unit designed for industrial-scale surface passivation. The TFS NX300 can, if necessary, be fully automated with cassette-to-cassette loading and handling operations. More information about the TFS NX300 is available on the TFS NX300 equipment page.

Beneq P800 for single-side coating

For single-side coating, we offer the P800 Thin Film System. The P800 is a production proven system with options for manual, semi-automatic and fully automatic operation. As a compact stand-alone system, the P800 is ideal for upgrading existing production lines. More information about the P800 is available on the P800 equipment page.