Surface Passivation for c-Si
Beneq ALD industrial surface passivation of c-Si solar cells
A proven means to improve the efficiency of crystalline silicon (c-Si) solar cell wafers is surface passivation by atomic layer deposition (ALD). Passivation of the surface enhances the overall cell efficiency by prolonging the charge-carrier effective lifetime. Surface passivation by ALD is beneficial on both the front and rear surface of an n-type wafer.
Beneq batch ALD equipment P800 and TFS NX300, which have been developed with and for the PV industry, are designed for industrial surface passivation (Al2O3) treatment of c-Si solar cell wafers. With Beneq equipment, surface passivation can be applied to both n- and p-type cells.
Benefits of using Beneq ALD system
1 + percentage point increase in efficiency
Completely conformal and pinhole-free passivation layer
No plasma damage
Low-temperature processing (150 - 250 °C)
No atmospheric contamination
1600 wafers/hour, single-side coating on a Beneq P800
2000 wafers/hour, double-side coating on a Beneq TFS NX300
Cost of ownership
0.021 €/wafer, single-side coating on a Beneq P800
0.034 €/wafer, double-side coating on a Beneq TFS NX300
For customers to gain instant access to the benefits of ALD and Al2O3 surface passivation, prior to industrial production, Beneq offers extensive coating services.
Beneq TFS NX300 for double-side coating
For double-side coating, we offer the TFS NX300 Thin Film System. It is an independent coating unit designed for industrial-scale surface passivation. The TFS NX300 can, if necessary, be fully automated with cassette-to-cassette loading and handling operations. More information about the TFS NX300 is available on the TFS NX300 equipment page.
Beneq P800 for single-side coating
For single-side coating, we offer the P800 Thin Film System. The P800 is a production proven system with options for manual, semi-automatic and fully automatic operation. As a compact stand-alone system, the P800 is ideal for upgrading existing production lines. More information about the P800 is available on the P800 equipment page.
Download Surface Passivation of c-Si Solar Cells brochure (pdf).