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List of Publications
Hot paper: Atomic layer deposition of polyimide thin films Original page,
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Kukli, K., Niinistö J., Tamm A., Lu J., Ritala M., Leskelä M., Putkonen M., Niinistö L., Song F., Williams P., Heys P.N., Atomic Layer Deposition of ZrO2 and HfO2 on deep trenched and planar silicon, Microel. Engineer 84 (2007) 2010-2013
Niinistö J., Putkonen M., Niinistö L., Song F., Williams P., Heys P.N., Odedra R., Atomic Layer Deposition of HfO2 Thin Films Exploiting Novel Cyclopentadienyl Precursors at High Temperatures.
Pimenoff, J., Hovinen, A., Rajala, M., Glass Coating by Atmospheric Flame Spray Nanoparticle Deposition, Proc. 6th International conference on Coatincs on Glass and Plastics (ICCG), Dresden 2006, 135-138.
Vainio, T., A Functional Coating System, Glass Worldwide, No. 6, 2006, p. 40.
Putkonen, M., Harjuoja, J., Sajavaara, T., Niinistö, L., Atomic layer deposition of polyimide thin films, Journal of Materials Chemistry, DOI: 10.1039/b612823h, 2006.
Vainio, T., nHALO Coatings and Surface Modification for Glass , Annual Symposium of China Architectural and Industrial Glass Association, Guangzhou, China, August 27, 2005.
Ahonen, S., Equipment for manufacturing nano - business as usual?, Nanoharju Goes Global seminar, Lohja, Finland, November 23, 2005.
Vainio, T., Industrial Equipment for Functional Coatings Based on Nanotechnology, TEKES NanoTech Seminar in Japan, Tokyo, February 23, 2006.
Pimenoff, J., nHALO-liekkiruiskutus - funktionaalisten pinnoitteiden valmistaminen ja laitetekniikka, TUT Coating Days, Tampere, May 4, 2006.
Vainio, T., nHALO - Invisible Nanotechnology for Windows, Tekes FinNano Annual seminar, Helsinki, May 18, 2006.
Sneck, S., Soininen, P., Putkonen, M., Norin, L., A New Way to Utilize Atomic Layer Deposition - Case Study: Optical Fiber Manufacturing, AVS 6th International Conference on Atomic Layer Deposition, Seoul, Korea, July 24-26, 2006.
Sneck, S., Saikkonen, M., Novel Thin Film Anti-Tarnish Method for Silver, The 5th China Int'l Silver Conference, Panyu, China, September 28-30, 2006.
Sneck, S. and Pinomaa, T., A Novel Anti-Tarnish Method for Silver (nSILVERTM) , World Money Fair, Berlin, Germany, February 1, 2007.
Sneck, S., Versatile Atomic Layer Deposition System - A Flexible Research Platform and a Reliable Production Unit, Tekes FinNano 2nd Annual seminar, Helsinki, March 27, 2007.
Norin, L., Vanin, E., Soininen, P., Putkonen, M., Atomic Layer Deposition as a New Method for Rare-Earth Doping of Optical Fibers.
S. Sneck, High Capacity Atomic Layer Deposition for Industrial Production, 50th Annual Technical Conference Proceedings of the Society of Vacuum Coaters, Kentucky, USA, 2007.
Rajala, M., High-growth-rate production of hard low-e coatings, Glass Processing Days, Tampere, Finland, June 15, 2007.
V. Malinena, M.Putkonen, T. Sajavaara, M. Kemell, E. Puukilainen, M. Ritala, M.LeskeläEffects of ALD TiN on the Abrasion Resistance of Three Stainless Steel Grades.
Sangyuenyongpipat S., Sagari Arcot A., Gorelick S., Laitinen M., Sajavaara T., Rahkila P., Cheng S., Putkonen M., Whitlow H.J., Nanolithography Studies of Chemical and Topographical Signaling on Osteoblast Cells,, MRS Spring Meeting, San Francisco, CA, USA, April 10 - 13, 2007.
Kääriäinen T., Tanttari M., Cameron C., Putkonen M., Improvements to the Adhesion of Sputtered Films on Polymers by a Nanometre-scale Oxide Intermediate Layer Deposited by ALD, FinNano Annual Seminar 2007, Helsinki, Finland, March 27, 2007.
L. Xu, P. Rahkila, T. Sajavaara, M. Putkonen, H.J. Whitlow, S. Cheng, Attachment of Osteoblast-like Cells on ALD-derived Hydroxyaptite Surfaces, ChinaNano, Beijing, China, June 4-6, 2007.
Mäkelä J.M., Keskinen H., Aromaa, M., Hupa, L., Piispanen, M., Deppert, K., Wagner J.B., Wallenberg L.R., Persson S., Lang M., Sundberg P., Gunnarsson G., Pimenoff J., Kronberg T., Pore V., Heikkilä M., Ritala M., Leskelä M., Raulio M., Salkinoja-Salonen M.S., Airaksinen V-M., A Nordic Project on Enhanced Functionality of Self-Cleaning and Antibacterial Surface Coatings,, 10th International Conference and Exhibition of the European Ceramic Society, Berlin, Germany, June 17 - 21, 2007.
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