FCS 500
Functional Coating System FCS 500 for nanoparticle synthesis and R&D coating

The Beneq FCS 500 for nHALO® research offers unprecedented freedom of choice of materials and particle sizes at the flick of a switch for laboratory-scale research and development.
The Beneq FCS 500 Functional Coating System is a flexible and robust laboratory-scale tool for synthesis of nano-sized particles and coating research and development. The system is designed to accommodate a wide range of substrate materials and precursor chemistries. The produce species, in terms of nanoparticles, range from noble metals like silver (Ag) and palladium (Pd), through metal oxides like titania (TiO2) and alumina (Al2O3), to combinations thereof like TiO2-Ag and other complexes. The particle size is easily adjustable within the range of 5 to 200 nm (primary particle size), with a narrow size distribution (monomodal).
The raw material capabilities of the system are impressive, and both liquid and vaporous precursors qualify for the synthesis process. Usually, for a metal oxide particles, the raw material is a metal salt (nitrate or sulphate) dissolved in an alcohol or de-ionized water. Other common raw materials are alkoxides, which are especially convenient when a metal is not available as a metal salt.
The FCS 500 is best at use in research in and developing thin films, functional coatings and surface modifications. The nature of the particle synthesis process, nHALO, enables diverse particle chemistries and morphologies, as well as the use of different types of substrate materials. The produced nanoparticles are directly deposited on the substrate, which provides for the desired coating and thereto-related properties. Typical substrates are glass, ceramics and steel or other metals. Coating applications of the FCS 500 include coloration of glass, anti-microbial coatings, surface doping and hydrophilic surface treatment.
For pyrolytic thin film hard coating research, the Beneq FCS 500 can also be equipped with the nAERO® aerosol coating process.
Performance highlights
- robust and reliable nanoparticle synthesis
- versatile raw material versatility
- broad range of produce species (noble metals, metal oxides, combinations thereof etc.)
- particle synthesis and coating in one work step
- optional particle collection function
Technical specifications (nHALO process)
| Substrate temperature range | 25 - 600 °C (1000 °C optional) |
| Substrate types and dimensions |
- single planar (small): 100 × 100 × 4 (mm) |
| Substrate coating speed | up to 25 m/min |
| Particle production rate | up to 2000 mg/min |
| Particle size | 5 to 200 nm1 |
| Size distribution type | monomodal |
| Control system | PLC control with PC user interface |
| Main dimensions, furnace and burner (L × W × H) | 3050 × 1200 × 1900 (mm) |
| Main dimensions, gas, electric and precursor cabinet (L × W × H) | 1200 × 800 × 2300 (mm) |
1 primary particle size, the largest being fully residual particles.
More information
Download FCS 500 brochure (pdf).





