ALD equipment in general
At Beneq, we have approached ALD tool design with an open mind and innovative spirit. Our goal is to develop new applications and business opportunities by combining experience with invention. Today, Beneq represents the uttermost expertise in ALD. Since 2005, we have launched equipment for research, batch production and continuous industrial manufacturing, all incorporating that special quality that makes Beneq equipment worth your while.
Not all ALD equipment can do the same thing
Beneq ALD equipment offers proven excellence in technical performance. Our systems all combine an uncompromisingly high quality of coating with extremely low cycle times. For the best in ALD coating, Beneq is your natural choice.
Beneq ALD offers you a diverse palette of equipment, from pure research tools to industrial production workhorses. All our equipment is planned, designed and manufactured by professionals for professionals. Some of our systems, e.g., TFS 1200 and TFS NX300, are application-specific and therefore focused on certain processes and properties. These application-specific systems are the result of in-depth work together with customers aiming for reliable production equipment and a solution for their opportunity. Below is a list of our ALD equipment offering.
- TFS 200, for ALD research, with superior CCP plasma, including Particle ALD™ option
- TFS 200R, for spatial ALD research
TFS 500, multi-purpose batch ALD system
- TFS 600, batch ALD system, up to 400x500 mm (Gen 2)
- TFS 1200, batch ALD system, up to 1200x1200 mm (Gen 4)
- TFS NX300, high volume batch ALD system, 156x156 mm
- P400A and P800, multi-purpose batch ALD system
Particle ALD is a trademark of ALD NanoSolutions, Inc.