ALD equipment in general

At Beneq, we have approached ALD tool design with an open mind and innovative spirit. Our goal is to develop new applications and business opportunities by combining experience with invention. Today, Beneq represents the uttermost expertise in ALD. Since 2005, we have launched equipment for research, batch production and continuous industrial manufacturing, all incorporating that special quality that makes Beneq equipment worth your while.
 

Not all ALD equipment can do the same thing

Beneq ALD equipment offers proven excellence in technical performance. Our systems all combine an uncompromisingly high quality of coating with extremely low cycle times. For the best in ALD coating, Beneq is your natural choice.

Beneq ALD offers you a diverse palette of equipment, from pure research tools to industrial production workhorses. All our equipment is planned, designed and manufactured by professionals for professionals. Some of our systems, e.g., TFS 1200 and TFS NX300, are application-specific and therefore focused on certain processes and properties. These application-specific systems are the result of in-depth work together with customers aiming for reliable production equipment and a solution for their opportunity. Below is a list of our ALD equipment offering.

• TFS 200, for ALD research, including Particle ALD™
• TFS 200R, for continuous mode ALD research
• TFS 500, for ALD research and batch production
   
• TFS 600, for industrial OLED encapsulation
• TFS 1200, for industrial in-line integrated or batch CIGS solar cell buffer layer
• TFS NX300, for industrial fully-automated c-Si solar cell surface passivation
• P400A and P800, for industrial ALD batch production

• WCS 500, for roll-to-roll ALD research and production scale-up

 

Particle ALD is a trademark of ALD NanoSolutions, Inc.
 

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